Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Sonochemical Synthesis, Thermal Studies and X-ray Structure of Precursor [Zr(acac)3(H2O)2]Cl for Deposition of Thin Film of ZrO2 by Ultrasonic Aerosol Assisted Chemical Vapour Deposition

  • Hussain, Muzammil (Department of Chemistry/National Centre of Physics, Quaid-i-Azam University) ;
  • Mazhar, Muhammad (Department of Chemistry/National Centre of Physics, Quaid-i-Azam University) ;
  • Rauf, Muhammad Khawar (Department of Chemistry, Faculty of Engineering, Gifu University) ;
  • Ebihara, Masahiro (Department of Chemistry, Faculty of Engineering, Gifu University) ;
  • Hussain, Tajammal (National Centre of Physics, Quaid-i-Azam University)
  • Published : 2009.01.20
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Abstract

A new precursor [$Zr(acac)_{3}(H_{2}O)_{2}$] was synthesized by Sonochemical technique and used to deposit thin $ZrO_{2}$ film on quartz and ceramic substrate via ultrasonic aerosol assisted chemical vapour deposition (UAACVD) at 300 ${^{\circ}C}$ in oxygen environment followed by annealing of the sample for 2-3 minutes at 500 ${^{\circ}C}$ in nitrogen ambient. The molecular structure of the precursor determined by single crystal X-ray analysis revealed that the molecules are linked through intermolecular hydrogen bonds forming pseudo six and eight membered rings. DSC and TGA/FTIR techniques were used to determine thermal behavior and decomposition temperature of the precursor and nature of evolved gas products. The optical measurement of annealed $ZrO_{2}$ film with tetragonal phase shows optical energy band gap of 5.01 eV. The particle size, morphology, surface structure and composition of deposited films were investigated by XRD, SEM and EDX.

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References

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