Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Dielectric Properties of Al2O3 Thick Films Grown by Aerosol Deposition Method

에어로졸 데포지션법으로 성막된 Al2O3 후막의 유전특성

  • Park, Jae-Chang (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology, Department of Ceramic Engineering Hanyang University) ;
  • Yoon, Young-Joon (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Kim, Hyo-Tae (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Koo, Eun-Hae (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Nam, Song-Min (Department of Electronic Materials Engineering Kwangwoon University) ;
  • Kim, Jong-Hee (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Shim, Kwang-Bo (Department of Ceramic Engineering Hanyang University)
  • 박재창 (요업기술원 융복합기술본부 융합기술팀, 한양대학교 신소재공학과) ;
  • 윤영준 (요업기술원 융복합기술본부 융합기술팀) ;
  • 김효태 (요업기술원 융복합기술본부 융합기술팀) ;
  • 구은회 (요업기술원 융복합기술본부 융합기술팀) ;
  • 남송민 (광운대학교 전자재료공학과) ;
  • 김종희 (요업기술원 융복합기술본부 융합기술팀) ;
  • 심광보 (한양대학교 신소재공학과)
  • Published : 2008.07.31
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Abstract

Aerosol Deposition Method (ADM) is a novel technique to grow ceramic thick films with high density and nano-crystal structure at room temperature. $^{1,2)}$ For these unique advantages of ADM, it would be applied to the fabrication process of 3-D integration ceramic modules effectively. However, it is critical to control the properties of starting powders, because a film formation through ADM is achieved by impaction and consolidation of starting powders on the substrates. We fabricated alumina thick films by ADM for the application to integral substrates for RF modules. When the as-received alumina powders were used as a starting material without any treatments, it was observed that the dielectric properties of as-deposited alumina films, such as relative permittivity and loss tangent, showed high dependency on the frequency. In this study, some techniques of powder pre-treatments to improve the dielectric properties of alumina thick films will be shown and the effects of starting powders on the properties of AD films will be discussed.

Keywords

References

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