Transactions on Electrical and Electronic Materials

  • 제9권2호
  • /
  • Pages.52-56
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  • 2008
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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XPS Investigation and Field Emission Property of the Ar Plasma Processed Carbon Nanotube Films

  • Lee, Sun-Woo (Department of Electronic Engineering, The University of Tokyo) ;
  • Lee, Boong-Joo (Department of Electronic Engineering, Namseoul University) ;
  • Oda, Tetsuji (Department of Electrical Engineering, The University of Tokyo)
  • 발행 : 2008.04.30
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초록

Carbon nanotube films were fabricated by the catalytic CVD method. Plasma processed time effects on the field emission property were studied. The atomic structure was observed by using X-ray photoelectron spectroscopy (XPS). The surface composition changes were observed on the plasma processed CNT films. The O1s/C1s signal ratio and the Fls/Cls signal ratio changed from 1.1 % to 24.65 % and from 0 % to 3.1 % with plasma process time, respectively. We could guess it from these results that the Ar plasma process could change the surface composition effectively. In the case of the original-CNT film, no carbon shift was observed. In the case of the Ar plasma processed CNT films, however the oxygen related carbon shifts were observed. This oxygen related carbon shift at higher binding energy implies the increment of amount of the oxygen. It's possible that the increment of these bonds between carbon and oxygen results in the improvement of field emission performance.

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참고문헌

  1. S. Iijima, "Helical micro-tubules of graphitic carbon", Nature, Vol. 354, p. 56, 1991 https://doi.org/10.1038/354056a0
  2. J. M. Bonard, F. Maier, T. Stökli, A. Chäelain, W. A. de Heer, J.-P. Salvetat, and L. Forr, "Field emission properties of multiwalled carbon nanotubes", Ultramicroscopy, Vol. 73, p. 7, 1998 https://doi.org/10.1016/S0304-3991(97)00129-0
  3. J. M. Bonard, H. Kind, T. Stockli, and L.-O. Nilsson, Solid State Electronics 45 (2001) Bonard, J.-M., Kind, H., Stockli, T., and Nilsson, L.-O., "Field emission from carbon nanotubes: the first five. years", Solid State Electron., Vol. 45, p. 893, 2001 https://doi.org/10.1016/S0038-1101(00)00213-6
  4. W. B. Choi, D. S. Chung, J. H. Kang, H. Y. Kim, Y. W. Jin, I. T. Han, Y. H. Lee, J. E. Jung, N. S. Lee, G. S. Park, and J. M. Kim, "Fully sealed, high-brightness carbon nanotube field emission display", Appl. Phys. Lett., Vol. 75, p. 3129, 1999 https://doi.org/10.1063/1.125253
  5. W.-H. Moon, W.-W. Kim, and H.-J. Hwang, "The electronic structure of carbon nanotubes with finite length : Tight binding theory", Trans. EEM, Vol. 3, No. 1, p. 23, 2002
  6. R. M. D. Stevens, N. A. Frederick, B. L. Smith, D. E. Morse, G. D. Stucky, and P. K. Hansma, "Carbon nanotubes as probes for atomic force microscopy", 2000 IOP Publishing ltd. Nanotechnology 11, 2000
  7. S. Akita, H. Nishijima, T. Kishida, and Y. Nakayama, "Nanoindentation of polycarbonate using carbon nanotube tip", Jpn J. Appl. Phys., Vol. 39, p. 7086, 2000 https://doi.org/10.1143/JJAP.39.7086
  8. Tong Y., Liu C., Hou P. X., H. M. Cheng, N. S. Xu, and J. Chen, "Field emission from aligned multi-walled carcon nanotubes", Physica B, Vol. 323, 2002
  9. K. A. Dean, B. R. Chalamala, B. F. Coll, Y. W. Xie, and J. E. Jaskie, "Carbon nanotube field emission electron sources", New Diamond Front. Carbon Technol., Vol. 12, No. 4, p. 165, 2002
  10. R. H. Fowler and L. W. Nordheim, "Electron emission in intense electric fields", Proc. R. Soc. London, Ser., Vol. A119, p. 173, 1928
  11. Y. Saito and S. Uemura, "Field emission from carbon carbon nanotubes and Its application to electron sources", Carbon, Vol. 38, p. 169, 2000 https://doi.org/10.1016/S0008-6223(99)00139-6