초록
휴대용 XRF(X-Ray Fluorescence) 장치에 적용하기 위하여 개발한 투과 양극형 x-ray tube를 이용하여 XRF 실험을 하고, x-ray tube가 XRF data에 미치는 영향을 조사하였다. W-target tube와 Rh-target tube를 이용하여 측정한 XRF data는 알려진 결과와 잘 일치하였다. 35 kV와 관전압과 $40{\mu}A$의 관전류에서 W-target tube로 측정한 Fe $K_{\alpha}$-line의 FWHM은 약 180 eV로써, 이 값은 물질의 성분분석을 하기에 충분한 것으로 확인하였다. XRF data와 x-ray tube의 적분강도 곡선을 비교 분석해 본 결과, 휴대용 XRF 장치에는 W-Target tube보다는 Rh-Target tube를 사용하는 것이 더 유리함을 밝혀내었다.
By using the transmission anode x-ray tube developed to apply to the hand-held XRF equipment, we carried out XRF experiment and evaluated the influences of the x-ray tube on XRF spectra. XRF data, which is measured using the W-target and Rh-target tube, were good agreements with the known results. FWHM of Fe $K_{\alpha}$-line measured by W-target tube with the 35 kV-tube voltage and the $40{\mu}A$-tube current was 180 eV. This result reveals that our XRF equipment using the transmission anode x-ray tube is enough for a qualitative analysis of materials. By comparison XRF data with the integrated intensity of x-ray tube, it was confirmed that Rh-target tube is better than W-target tube for application to the hand-held XRF equipment.