Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method

  • Lee, Seung-Yup (Department of Inorganic Materials Engineering, Kyungpook National University) ;
  • Park, Byung-Ok (Department of Inorganic Materials Engineering, Kyungpook National University)
  • 발행 : 2008.04.30

초록

Zinc oxide (ZnO) thin films were prepared by a sol-gel method. The structural and electrical properties were investigated by varying drying and annealing temperatures. The thin films were coated (250 nm) by spin-coating method on glass substrates. The optimum drying temperature of ZnO thin films was 300$^{\circ}C$ where the resistivity was the lowest and the preferred c-axis orientation was the highest. The annealing was carried out in air and inert atmospheric conditions. The degree of the preferred c-axis orientation was estimated. The highest preferred c-axis orientation was recorded at 600$^{\circ}C$. The preferred c-axis orientation and grain growth resulted in the mobility enhancement of the ZnO thin films, and the lowest resistivity was 0.62${\Omega}{\cdot}cm$ at 600$^{\circ}C$.

키워드

참고문헌

  1. R.G. Gordon, "Criteria for choosing transparent conductors", MRS Bull. 25(8) (2000) 52
  2. I. Stambolova, K. Konstantinov, S. Vassilev, P. Peshev and T. Tsacheva, "Lanthanum doped $SnO_2$ and ZnO thin films sensitive to ethanol and humidity", Mater. Chem. Phys. 63 (2000) 104 https://doi.org/10.1016/S0254-0584(99)00193-5
  3. M. Benetti, D. Cannatá, F.D. Pietrantonio, E. Verona, P. Verardi, N. Scarisoreanu, D. Matei, G. Dinescu, A. Moldovan and M. Dinescu, "Structural and piezoelectric properties of pulsed laser deposited ZnO thin films", Superlattices Microstruct. 39 (2006) 366 https://doi.org/10.1016/j.spmi.2005.08.073
  4. M. Chen, Z.L. Pei, C. Sun, J. Gong, R.F. Huang and L.S. Wen, "ZAO: an attractive potential substitute for ITO in flat display panels", Mater. Sci. Eng. B 85 (2001) 212
  5. T. Pauporté and D. Lincot, "Electrodeposition of Semi conductors foroptoelectronic devices: result on znic oxide", Electrochim. Acta 45 (2000) 3345 https://doi.org/10.1016/S0013-4686(00)00405-9
  6. Y. Yamamoto, K. Saito, K. Takahashi and M. Konagai, "Preparation of boron-doped ZnO thin films by photoatomic layer deposition", Sol. Energ. Mater. Sol. Cells 65 (2001) 125 https://doi.org/10.1016/S0927-0248(00)00086-6
  7. D. Song, P. Widenborg, W. Chin and A.G. Aberle, "Investigation of lateral parameter variations of Aldoped znic oxide films prepared on glass substrates by rf magnetron sputtering", Sol. Energ. Mater. Sol. Cells 73 (2002) 1 https://doi.org/10.1016/S0927-0248(01)00104-0
  8. B.M. Ataev, A.M. Bagamadova, V.V. Mamedov, A.K. Omaev and M.R. Rabadanov, "Thermally stable, highly conductive, and transparent ZnO layers prepared in situ by chemical vapor deposition", J. Cryst. Growth 198/ 199 (1999) 1222 https://doi.org/10.1016/S0022-0248(98)01217-2
  9. T.Y. Ma and S.C. Lee, "Effects of aluminum content and substrate temperature on the structural and electrical properties of aluminum-doped ZnO films prepared by ultrasonic spray pyrolysis", J. Mater. Sci. Mater. Electron. 11 (2000) 305 https://doi.org/10.1023/A:1008925315123
  10. J.H. Lee, K.H. Ko and B.O. Park, "Electrical and optical properties of ZnO transparent conducting films by the sol-gel method", J. Cryst. Growth 247 (2003) 119 https://doi.org/10.1016/S0022-0248(02)01907-3
  11. Y.S. Kim, W.P. Tai and S.J. Shu, "Effect of preheating temperature on structural and optical properties of ZnO thin films by sol-gel process", Thin Solid Films 491 (2005) 153 https://doi.org/10.1016/j.tsf.2005.06.013
  12. S. Fujihara, C. Sasaki and T. Kimura, "Crystallization behavior and origin of c-axis orientation in sol-gelderived ZnO : Li thin films on glass substrates", Appl. Surf. Sci. 180 (2001) 341 https://doi.org/10.1016/S0169-4332(01)00367-1
  13. S. Major, A. Banerjee and K.L. Chopra, "Annealing studies of undoped and indium-doped films of zinc oxide", Thin Solid Films 122 (1984) 31 https://doi.org/10.1016/0040-6090(84)90376-6
  14. K. Ogata, K. Sakurai, Sz. Fujita, Sg. Fujita and K. Matsushige, "Effects of thermal annealing of ZnO layers grown by MBE", J. Cryst. Growth 214-215 (2000) 312 https://doi.org/10.1016/S0022-0248(00)00099-3