한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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미세형상 가공을 위한 Micro Slot 가공에서의 공구변형에 의한 가공오차 보상

Machining Error Compensation for Tool Deflection in Micro Slot-Cutting Processes for Fabrication of Micro Shapes

  • 손종인 (인천대학교 기계공학과 대학원) ;
  • 윤길상 (한국생산기술연구원 정밀금형팀) ;
  • 서태일 (인천대학교 기계공학과)
  • 발행 : 2008.04.15
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초록

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

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참고문헌

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