반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제7권2호
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- Pages.63-67
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- 2008
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- 1738-2270(pISSN)
고효율 AC PDP용 MgO 보호막 형성을 위한 중성빔 보조 증착 장비에 관한 연구
A Study on the Equipment of Neutral Beam Assisted Deposition for MgO Protective Layer of High Efficient AC PDP
- Li, Zhao-Hui (Department of Electronics Engineering, Kyungwon University) ;
- Kwon, Sang-Jik (Department of Electronics Engineering, Kyungwon University)
- 발행 : 2008.06.30
초록
The MgO protective layer plays an important role in plasma display panels (PDPs). Our previous work demonstrated that the properties of MgO thin film could be improved, which were deposited by ion beam assisted deposition (IBAD). However arc discharge always occurs during the IBAD process. To avoid this problem, oxygen neutral beam assisted deposition (NBAD) is used to deposit MgO thin films in this paper. The energy of the oxygen neutral beam was used as the parameter to control the deposition. The experimental results showed that the oxygen neutral beam energy was effective in determining in F/