반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제7권3호
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- Pages.29-34
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- 2008
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- 1738-2270(pISSN)
반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
Development and Evaluation of Differential Pressure Type Mass Flow Controller for Semiconductor Fabrication Processing
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Ahn, Jin-Hong
(HCT, R&D Center) ;
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Kang, Ki-Tai
(Hanayng University Graduate School) ;
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Ahn, Kang-Ho
(Hanyang University)
- 발행 : 2008.09.30
초록
This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.
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