Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 7 Issue 3
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- Pages.1-4
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- 2008
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- 1738-2270(pISSN)
Generation of Si-O-C Bond without Si-$CH_3$ Bond in Hybrid Type SiOC Film
- Oh, Teresa (School of Electronic and Information Engineering, Cheongju University)
- Published : 2008.09.30
Abstract
The chemical shift of SiOC film was observed according to the flow rate ratio. SiOC film had the broad main band of