International Journal of Precision Engineering and Manufacturing

  • 제9권2호
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  • Pages.44-49
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  • 2008
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Practical Ultraprecision Positioning of a Ball Screw Mechanism

  • Sato, Kaiji (Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology) ;
  • Maeda, Guilherme Jorge (Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology)
  • 발행 : 2008.04.01
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초록

This paper describes the problem of ultraprecision positioning with a ball screw mechanism in the microdynamic range, along with its solution. We compared the characteristics of two ball screw mechanisms with different table masses. The experimental results showed that the vibration resulting from the low stiffness of the ball screw degraded the positioning performance in the microdynamic range for the heavyweight mechanism. The proposed nominal characteristic trajectory following (NCTF) controller was designed for ultra precision positioning of the ball screw mechanism. The basic NCTF control system achieved ultra precision positioning performance with the lightweight mechanism, but not with the heavyweight mechanism. A conditional notch filter was added to the NCTF controller to overcome this problem. Despite the differences in payload and friction, both mechanisms then showed similar positioning performance, demonstrating the high robustness and effectiveness of the improved NCTF controller with the conditional notch filter. The experimental results demonstrated that the improved NCTF control system with the conditional notch filter achieved ultra precision positioning with a positioning accuracy of better than 10 nm, independent of the reference step input height.

키워드

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