대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제32권5호
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  • Pages.424-429
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  • 2008
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  • 1226-4873(pISSN)
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  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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초소수성 표면 개질에 미치는 마이크로 나노 복합구조의 영향

The Effect of Micro Nano Multi-Scale Structures on the Surface Wettability

  • 이상민 (부산대학교 기계공학부) ;
  • 정임덕 (부산대학교 기계공학부) ;
  • 고종수 (부산대학교 기계공학부, 부산대학교 정밀정형및금형가공연구소(ERC/NSDM))
  • 발행 : 2008.05.01
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초록

Surface wettability in terms of the size of the micro nano structures has been examined. To evaluate the influence of the nano structures on the contact angles, we fabricated two different kinds of structures: squarepillar-type microstructure with nano-protrusions and without nano-protrusions. Microstructure and nanostructure arrays were fabricated by deep reactive ion etching (DRIE) and reactive ion etching (RIE) processes, respectively. And plasma polymerized fluorocarbon (PPFC) was finally deposited onto the fabricated structures. Average value of the measured contact angles from microstructures with nanoprotrusions was $6.37^{\circ}$ higher than that from microstructures without nano-protrusions. This result indicates that the nano-protrusions give a crucial effect to increase the contact angle.

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참고문헌

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