Abstract
In this study, we propose and develop PDMS-based modular actuators. The microactuator which looks like a small insect uses thermal expansion power of the PDMS (polydimethylsiloxane; $sylgar^{(R)}$ 184 silicone elastomer). The PDMS-based microactuator provides a large displacement due to a high thermal expansion coefficient (approximately 310ppm). The microacruator with 1mm length $350{\mu}m$ width is optimized by using a numerical analysis. The shape of the PDMS actuatoris variously designed. They are placed at several positions to find the optimal position that provides a high transformation ratio. The PDMS-based microactuators are fabricated using a conventional micromaching technique. The fabricated microactuator is heated using a hot-plate. The actuator displacement is measured as a function of temperature from $27^{\circ}C$ to $300^{\circ}C$. The experimental results are compared to the simulation result. When heating temperature up to $300^{\circ}C$ is applied to the PDMS actuator, each V-groove-shaped joint is actuated $30{\mu}$ mat $300^{\circ}C$. Anotherdesign of the microactuator has a maximum displacement of about 656mm.