한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)
- 제7권1호
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- Pages.47-52
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- 2008
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- 1598-6721(pISSN)
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- 2288-0771(eISSN)
거친 가공표면 형상의 고정밀 측정법 개발
Precision Profile Measurement on Roughly Processed Surfaces
초록
We present a 3-D profiler specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional non-contact interferometer. The profiler comprises multiple two-point-diffraction sources made of single-mode optical fibers. Test measurement proves that the proposed profiler is well suited for the warpage inspection of microelectronics components with rough surface, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip package.
키워드