Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)
- Volume 7 Issue 1
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- Pages.47-52
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- 2008
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- 1598-6721(pISSN)
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- 2288-0771(eISSN)
Precision Profile Measurement on Roughly Processed Surfaces
거친 가공표면 형상의 고정밀 측정법 개발
- Published : 2008.03.30
Abstract
We present a 3-D profiler specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional non-contact interferometer. The profiler comprises multiple two-point-diffraction sources made of single-mode optical fibers. Test measurement proves that the proposed profiler is well suited for the warpage inspection of microelectronics components with rough surface, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip package.