Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Control for a Yaw Error Compensation System of Linear Motor Stage

리니어모터 스테이지 편요오차 보상장치 제어

  • 이승현 (경원대학교 대학원 기계공학과) ;
  • 강민식 (경원대학교 기계자동차공학과)
  • Published : 2008.10.20
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Abstract

Linear motor stage is a useful device in precision engineering field because of its simple power transmission mechanism and accurate positioning. Even though linear motor stage shows fine positioning accuracy along travel axis, geometric dependent errors which relay on machining and assembling accuracy should be addressed to increase total positioning performances. In this paper, we suggests a cost effective yaw error compensation servo-system which is mounted on platform of the stage and nullify travel position dependent yaw error. This paper also provides a method of designing a sliding mode control which is robust to existing friction disturbance and model uncertainties. The reachability condition of slinding mode control for the yaw error compensating servo-system has been established. From some experimental results by using an experimental set-up, the sliding mode control showed its effective in disturbance rejection and its performance was superior to conventional linear controls.

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References

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