Transactions on Electrical and Electronic Materials

  • 제9권5호
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  • Pages.193-197
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  • 2008
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Design of Polycrystalline 3C-SiC Micro Beam Resonators with Corrugation

  • 발행 : 2008.10.31
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초록

On the purpose of increasing resonant frequency without sacrificing quality factor as well as much decreasing dimensions, corrugated micro beam resonator based on polycrystalline 3C-SiC films is the applicable solution. In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same-size flat rectangular. With the dimension of 36x12x0.5 ${\mu}m^{3}$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size but corrugation width of 6 ${\mu}m$ and depth of 0.4 ${\mu}m$, the corrugated cantilever reaches the resonant frequency at 1.252 MHz.

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참고문헌

  1. N. V. Larvik, M. J. Sepaniak, and P. G. Datskos, 'Cantilever transducers as a platform for chemical and biological sensors', Rev. Sci. Instrum., Vol. 75, No. 7, p. 2229, 2004 https://doi.org/10.1063/1.1763252
  2. L. Latorre, V. Beroulle, and P. Nouet, 'Design of CMOS MEMS based on mechanical resonators using a RF simulation approach', IEEE Trans. Computer-Aided Design of Integrated Circuits & Systs., Vol. 23, No. 6, p. 962, 2004 https://doi.org/10.1109/TCAD.2004.828113
  3. F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, 'High-Q HF microelectromechanical filters', IEEE J. Solid-State Circuits, Vol. 35, No. 4, p. 512, 2000 https://doi.org/10.1109/4.839911
  4. C. T.-C. Nguyen and R. T. Howe, 'Quality factor control for micromechanical resonators', Tech. Dig. IEEE Int. Electron Devices Meeting, United States, San Francisco, p. 505, 1992
  5. B. Ilic, Y. Yang, and H. G. Craighead, 'Virus detection using nanoelectromechanical devices', Appl. Phys. Lett., Vol. 85, p. 2404, 2004
  6. M. Ylimaula and M. Aberg, 'A 500 kHz micromechanical oscillator based on cantilever resonator', Proc. the 15th European Conf. on Circuit Theory & Design ECCTD'01, Finland, Espoo, p. 369, 2001
  7. D. J. Gorman, 'Free vibration analysis of beams and shafts', John Wiley & Sons, United States, p. 4, 1975
  8. J. Yang, T. Ono, and M. Esashi, 'Mechanical behavior of ultrathin microcantilever', Sens. Actuators, Vol. 82, p. 102, 2000 https://doi.org/10.1016/S0924-4247(99)00319-2
  9. M. Li, H. X. Tang, and M. L. Roukes, 'Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications', Nature Nanotech., Vol. 2, p. 114, 2007 https://doi.org/10.1038/nnano.2006.208
  10. G. S. Chung, K. S. Kim, and K. B. Han, 'Growth of polycrystalline 3C-SiC thin films using HMDS single precursor', J. of KIEEME(in Koeran), Vol. 20, No. 2, p. 156, 2007 https://doi.org/10.4313/JKEM.2007.20.2.156
  11. G. S. Chung and K. B. Han, '$H_2$ carrier gas dependence of young's modulus and hardness of chemical vapor deposited polycrystalline 3C-SiC thin films', Microelectronics J. (to be published)
  12. J. Yang, T. Ono, and M. Esashi, 'Energy dissipation in submicrometer thick single-crystal silicon cantilevers', J. Microelectromech. Syst., Vol. 11, No. 6, p.775, 2002 https://doi.org/10.1109/JMEMS.2002.805208
  13. G. S. Chung and C. M. Ohn, 'High etch rates of polycrystalline 3C-SiC films in magnetron enhanced $CHF_3$ Plasmas', Elec. Lett., Vol. 43, No. 20, p. 1117, 2007 https://doi.org/10.1049/el:20071050