Abstract
In this paper, multilayer actuator structured-ultrasonic nozzle and resonant inverter driving circuit were manufactured, respectively. Its electrical properties were investigated. Multilayer actuator structured ultrasonic nozzle was fabricated using PMN-PNN-PZT ceramics showing excellent piezoelectric characteristics. In order to drive ultrasonic nozzle, resonant PWM inverter was used. The purpose of this study is to find the optimal driving condition of ultrasonic nozzle. Accordingly, electrical and temperature characteristic of multilayer ultrasonic driving system were investigated by experiments as a function of the series resonance inductance. The driving current of ultrasonic nozzle showed the maximum current of 27 mA. Also, the surface temperature of ceramic vibrator showed $44^{\circ}C$ at driving time for 20 min. The ultrasonic nozzle was stably operated in the case of driving for more than 20 min.