초록
Transducer for ultrasonic linear motor with the symmetric and anti-symmetric modes was studied. The ultrasonic linear motor consists of two Langevin type piezoelectric vibrators that cross at right angles with each other in tip. In order to excite symmetric and anti-symmetric resonance modes, the transducer must have a phase shift of 90 degree in space and time. Therefore, the tip of transducer moves on an elliptical motion. In this paper, the finite element analysis was used to optimize dimension and displacement of the transducer. The ultrasonic motor was fabricated using the simulated result and the driving characteristics were measured. No-load velocity was 0.28[m/s] and the maximum efficiency was 30[%] in resonance frequency.
