초록
This paper describes the development of the calibration system for a multi-axis force/moment sensor and its uncertainty evaluation. This calibration system can generate the continuous forces (${\pm}Fx,\;{\pm}Fy$ and ${\pm}Fz$) and moments (${\pm}Mx,\;{\pm}My$ and ${\pm}Mz$). Many kinds of multi-axis force/moment sensors in industries should be carried out the characteristic test or the calibration with the calibration system that can generate the forces and the moments. The calibration systems have been already developed are the disadvantages of the low capacity, the generation of step forces(10N, 20N ...) and step moments(1Nm, 2Nm ...) with weights, the high coasts in manufacture and so on. In this paper, the calibration system for a multi-axis force/moment sensor that can generate the continuous three forces and three moments was developed. Their ranges are $0{\sim}2000N$ in all force-directions and $0{\sim}400Nm$ in all moment-directions. And the system was evaluated in the expanded relative uncertainty. They were ${\pm}0.0004$ in all forces ${\pm}Fx,\;{\pm}Fy$ and ${\pm}Fz$, and ${\pm}0.0004$ in all moments ${\pm}Mx,\;{\pm}My$ and ${\pm}Mz$.
