DOI QR코드

DOI QR Code

Structural and Electrical Properties of Bismuth Magnesium Niobate Thin Films deposited at Various Temperatures

  • Park, Jong-Hyun (School of Nano Science and Technology, Chungnam National University) ;
  • Yoon, Soon-Gil (School of Nano Science and Technology, Chungnam National University)
  • Published : 2007.08.31

Abstract

Structural and electrical properties of the fully crystallized-bismuth magnesium niobate ($Bi_2Mg_{2/3}Nb_{4/3}O_7$, BMN) films with 15 mol% excess bismuth deposited on Pt bottom electrode by pulsed laser deposition are characterized for various deposition temperatures. The BMN films were crystallized with a monoclinic structure from $300^{\circ}C$ and the surface roughness slightly decreases with increasing deposition temperature. The capacitance density of the films increases with increasing deposition temperature and especially, films deposited at $400^{\circ}C$ exhibit a capacitance density of approximately $620nF/cm^2$. The crystallized BMN films with approximately 170 nm thickness exhibit breakdown strength above 600 kV/cm (${\leq}10V$) irrespective of deposition temperature and a leakage current density of approximately $2{\times}10^{-8}A/cm^2$ at 590kV/cm (at 10 V).

Keywords

References

  1. Q. Zou, H.E. Ruda, B. G. Yacobi, K. Saegusa, and M. Farrell, 'Dielectric properties of lead zirconate titanate thin films deposited on metal foils', Appl. Phys. Lett., Vol. 77, p. 1038,2000 https://doi.org/10.1063/1.1312258
  2. J. P. Maria, K. Cheek, S. Streiffer, S. H. Kim, G. Dunn, and A. Kingon, 'Lead zirconate titanate thin films on base-metal foils: An approach for embedded high-permittivity passive components', J. Am. Ceram. Soc., Vol. 84, p. 2436, 2001
  3. D. P. Cann, C. A. Randall, and T. R. Shrout, 'Investigation of the dielectric properties of bismuth pyrochlores', Solid State Communications, Vol. 100, p. 529, 1996
  4. J. C. Nino, H. J. Youn, M. T. Lanagan, and C. A. Randall, '$Bi_{2}O_{3}$ solubility of Bi-based pyrochlores and related phases', J. Mater. Res., Vol. 17, p. 1178, 2002
  5. J. H. Park, C. J. Xian, N. J. Seong, S. G. Yoon, S. H. Son, H. M. Chung, J. S. Moon, H. J. Jin, S. E. Lee, J. W. Lee, H. D. Kang, and Y. K. Chung, 'Bismuth-based pyrochlore thin films deposited at low temperatures for embedded capacitor applications', Jpn. J. of Applied Physics part 1, Vol. 45, p. 7325, 2006 https://doi.org/10.1143/JJAP.45.7325
  6. J. H. Park, C. J. Xian, N. J. Seong, S. G. Yoon, S. H. Son, H. M. Chung, J. S. Moon, H. J. Jin, S. E. Lee, J. W. Lee, H. D. Kang, Y. K. Chung, and Y. S. Oh, 'Realization of a high capacitance density in $Bi_{2}Mg_{2/3}Nb_{4/3}O_{7}$ pyrochlore thin films deposited directly on polymer substrates for embedded capacitor applications', Appl. Phys. Lett., Vol. 89, p. 232910,2006 https://doi.org/10.1063/1.2402896
  7. C. J. Xian, J. H. Park, S. G. Yoon, J. W. Lee, W. C. Kim, S. T. Lim, S. H. Sohn, J. S. Moon, H. M. Jung, S. E. Lee, I. H. Lee, Y. K. Chung, M. K. Jeon, and S. I. Woo, 'Effect of thickness on electrical properties of bismuth-magnesium niobate pyrochlore thin films deposited at low temperature', J. Appl. Phys., Vol. 101, p. 084114, 2007 https://doi.org/10.1063/1.2715546