DOI QR코드

DOI QR Code

비대칭 마그네트론 스퍼터링법에 의한 비정질 질화탄소 박막의 합성 및 윤활 특성

Synthesis and Lubricant Properties of Nitrogen doped Amorphous Carbon (a-C:N) Thin Films by Closed-field unbalanced Magnetron Sputtering Method

  • 박용섭 (성균관대학교 정보통신공학부) ;
  • 조형준 (성균관대학교 정보통신공학부) ;
  • 최원석 (성균관대학교 정보통신공학부) ;
  • 홍병유 (성균관대학교 정보통신공학부)
  • 발행 : 2007.08.01

초록

The incorporation of N in a-C film is able to improve the friction coefficient and the adhesion to various substrates. In this study, a-C:N films were deposited on Si and steel substrates by closed-field unbalanced magnetron (CFUBM) sputtering system in $Ar/N_2$ plasma. The lubricant characteristics was investigated for a-C:N deposited with total working pressure from 4 to 7 mTorr. We obtained high hardness up to 24GPa, friction coefficient lower than 0.1 and the smooth surface of having the extremely low roughness (0.16 nm). The physcial properties of a-C:N thin film are related to the increase of cross-linked $sp^2$ bonding clusters in the film. However, the decrease of hardness, elastic modulus and the increase of surface roughness, friction coefficient with the increase of $N_2$ partial pressrue might be due to the effect of energetic ions as a result of the increase of ion bombardment with the increase of ion density in the plasma.

키워드

참고문헌

  1. J. Robertson, 'Diamond-like amorphous carbon', Mater. Sci. Eng. R, Vol. 37, p. 129, 2002 https://doi.org/10.1016/S0927-796X(02)00005-0
  2. 김종일, 배선기, '결정질 질화탄소 박막의 합성과 그 특성 해석', 전기전자재료학회논문지, 14권, 10호, p. 835, 2001
  3. I. Kleps, A. Angelescu, N. Ssmfirescu, A. Gil, and An Gorreia, 'Study of poros silicon, silicon carbide and DLC coated field emitters for pressure sensor application', Solid-State Elec., Vol. 45, p. 997, 2001 https://doi.org/10.1016/S0038-1101(01)00148-4
  4. A. Y. Liu and M. L. Cohen, 'Structural properties and electronic structure of low-compressibility materials: ${\beta}-Si_3N_4$ and hypothetical ${\beta}-Si_3N_4$', Phys. Rev. B, Vol. 41, p. 10727, 1990 https://doi.org/10.1103/PhysRevB.41.10727
  5. D. Liu, G. Benstetter, E. Lodermeier, I. Akula, I. Dudarchyk, Y. Liu, and T. Ma, 'SPM investigation of diamond-like carbon and carbon nitride films', Surf. Coat. Technol., Vol. 172, p. 194, 2003 https://doi.org/10.1016/S0257-8972(03)00338-4
  6. M. K. Fung, W. C. Chan, Z. Q. Gao, I. Bello, C. S. Lee, and S. T. Lee, 'Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD', Diam. & Relat. Mater., Vol. 8, p. 472, 1999 https://doi.org/10.1016/S0925-9635(98)00334-3
  7. X. L. Peng, Z. H. Barber, and T. W. Clyne, 'Surface roughness of diamond-like carbon films prepared using various techniques', Surf. Coat. Technol., Vol. 138, p. 23, 2001 https://doi.org/10.1016/S0257-8972(00)01139-7
  8. M. Neuhaeuser, H. Hilgers, P. Joeris, R. White, and J. Windeln, 'Raman spectroscopy measurements of DC magnetron sputtered carbon nitride (a-C:N) thin films for magnetic hard disk coatings', Diamond Relat. Mater., Vol. 9, p. 1500, 2000 https://doi.org/10.1016/S0925-9635(00)00276-4
  9. N. Tajirna, H. Saze, H. Sugumura, and O. Takai, 'Tribological properties of a-C:N and a-C films prepared by shielded arc ion plating', Vacuum, Vol. 59, p. 567, 2000 https://doi.org/10.1016/S0042-207X(00)00317-1
  10. W. J. Hsieh, P. S. Shih, J. H. Lin, C. C. Lin, U. S. Chen, S. C. Huang, Y. S. Chang, and H. C. Shih, 'Characterizaition and formation of ananocrystalline diamonds in a-C/N films by filtered cathodic vacuum arc plasma', Thin Solid Films, Vol. 469-470, p. 120, 2004
  11. M. Guerino, M. Massi, H. S. Maciel, C. Otanik, R. D. Mansano, P. Verdonck, and J. Libardi, 'The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films', Diamond Relat. Mater., Vol. 13, p. 316, 2004 https://doi.org/10.1016/j.diamond.2003.10.016
  12. F. Fendrych, L. Jastrabik, L. Pajasova, D. Chvostova, L. Soukup, and K. Rusnak, 'The mechanical, tribological and optical properties of CNx coatings prepared by sputtering methods', Diamond Relat. Mater., Vol. 7, p. 417, 1998 https://doi.org/10.1016/S0925-9635(97)00231-8
  13. L. Y. Chen and F. Chan-Nan Hong, 'Surface tension studies of (Si,N)-containing diamond-like carbon films deposited by hexamethyldisilazane', Diamond Relat. Mater., Vol. 12, p. 968, 2003 https://doi.org/10.1016/S0925-9635(02)00351-5
  14. V. Kulikovsky, P. Bohac, F. Franc, A. Deinka, V. Vorlicek, and L. Jastrabik, 'Hardness, intrinsisc stress, and structure of the a-C and a-C:H films prepared by magnetron spttering', Diamond Relat. Mater., Vol. 10, p. 1076, 2001 https://doi.org/10.1016/S0925-9635(00)00525-2