한국소음진동공학회논문집 (Transactions of the Korean Society for Noise and Vibration Engineering)

  • 제17권7호
  • /
  • Pages.565-571
  • /
  • 2007
  • /
  • 1598-2785(pISSN)
  • /
  • 2287-5476(eISSN)
한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
권호 표지
DOI QR코드

DOI QR Code

공기스프링을 이용한 방진테이블의 능동 제어

Active Control of Vibration Isolation Table Using Air-spring

  • 안채헌 (한국기술교육대학교 메카트로닉스공학부대학원) ;
  • 임광혁 (한국기술교육대학교 메카트로닉스공학부) ;
  • 진경복 (한국기술교육대학교 메카트로닉스공학부) ;
  • 임경화 (한국기술교육대학교 메카트로닉스공학부)
  • 발행 : 2007.07.20
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

키워드

참고문헌

  1. Song, J.-H., Kim, K.-Y. and Park, Y.-P., 1994, 'Active Control of Air-spring Vibration Isolator', Transactions of KSME, Vol. 18, No. 6, pp. 1605-1617
  2. Kim, K. Y., Yang, H. S. and Park, Y. P., 1996, 'Active Control of Isolation Table Using Hoc Control', Transactions of KSME, Vol. A20, No. 10, pp. 3079-3094
  3. Kim, I. S., Hwang, S. H., Han, M. S. and Koh, C. S. 2002, 'The Study on the Improvement of Dynamic Characteristics with Multi-orifice in Airspring' , Proceedings of the KSNVE Annual Spring Conference. pp. 97-103
  4. Erin, C., Wilson, B., 1998, 'AN Improved Model of a Pnuematic Vibration Isolator: Theory and Experiment', Journal of Sound and Vibration, Vol. 218, No.1, pp. 81-101 https://doi.org/10.1006/jsvi.1998.1777
  5. Emdadul Hoque, Masaya Takasaki, Yuji Ishino, Takeshi Mizuno, 2004, 'Design of a Mode-based Controller for 3-DOF Vibration Isolation System', Proceedings of the 2004 IEEE Conference on Robotics, Automation and Mechatronics, pp. 478-483
  6. Tressler, J. M, Clement, T., Kazerooni, H, Lim, M, 2002, 'Dynamic Behavior of Pneumatic Systems for Lower Extremity Extenders', Proceedings of the 2002 IEEE International Conference on Robotics & Automation, pp. 3248-3253
  7. Technical Background, TMC Co., USA

피인용 문헌

  1. A Comparative Study on the Dynamic Characteristics and Control Performances of Hybrid Mounts According to Element Configuration vol.22, pp.6, 2012, https://doi.org/10.5050/KSNVE.2012.22.6.556