Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 1 Serial No. 18
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- Pages.65-69
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- 2007
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- 1738-2270(pISSN)
Electrical and Optical Properties in Transparent Conducting Oxides: Effect of Ultra Violet Irradiation
- So, Byung-Soo (Department of Materials Science & Engineering Hong-Ik University) ;
- Hwang, Jin-Ha (Department of Materials Science & Engineering Hong-Ik University)
- Published : 2007.03.31
Abstract
A design of experiments was applied in order to investigate the effect of processing variables in UV irradiation on the electrical/optical properties in indium-zinc oxide thin films, The processing variables, equivalently input variables are listed as UV irradiation time, oxygen flow rate, and chamber pressure. The statistical significance of Ultra Violet (UV) treatment was confirmed using a paired-t test. The full factorial