반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

접촉형 변위센서를 이용한 LCD노광기용 스테이지 시스템

Stage System for LCD Exposure Equipment Using Touch-type Displacement Sensor

  • 임광국 (한국기술교육대학교 전기전자공학과) ;
  • 서화일 (한국기술교육대학교 전기전자공학과) ;
  • 조현찬 (한국기술교육대학교 전기전자공학과) ;
  • 김광선 (한국기술교육대학교 메카트로닉스공학과) ;
  • 강흥석 ((주)오에프티)
  • Yim, Kwang-Kuk (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Seo, Hwa-Il (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Cho, Hyun-Chan (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Kim, Kwang-Sun (Dept. of Mechatronic Engineering, Korea University of Technology and education) ;
  • Kang, Heung-Seok (Dept. of Exosure system, Opto Fintech CO., LTD)
  • 발행 : 2007.03.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

키워드