Speed Property Evaluation of an Inchworm Type Linear Stage

인치웜 구조를 갖는 선형 스테이지의 속도 특성연구

Precision stages are essential device for micro machines, fiber optic assembly systems, and biology instruments. In this paper, a precision inchworm type actuator for a linear stage is proposed and evaluated. An analytic method to design an inchworm type motor is proposed. Developed actuator provides fast motion compared with a commercial inchworm actuator, and can be used as an actuator for a stage in substitution for a conventional rotary actuator.