초정밀 공구 위치설정 오차의 보정

Compensation of Ultra-Precision Tool Position for Alignment Error

Geometrical error of ultra-precision machining due to spherical tool alignment error is analyzed. Deviation of spherical edge, ranged several ten micrometers, generates vertical and horizontal error of tool path and affects profile accuracy of machined surface. Simulation of machined error shows effect of tool alignment error and enables to estimate alignment error. This work provides technical insights into the minimizing of geometrical error of ultra-precision machining.