Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Surface Wettability in Terms of Prominence and Depression of Diverse Microstructures and Their Sizes

다양한 형태의 실리콘 미세 구조물을 이용한 초소수성 표면형상 구현

  • 하선우 (부산대학교 기계공학부) ;
  • 이상민 (부산대학교 미세기계전자시스템협동과정) ;
  • 정임덕 (부산대학교 미세기계전자시스템협동과정) ;
  • 정필구 (부산대학교 기계공학부) ;
  • 고종수 (부산대학교 기계공학부)
  • Published : 2007.06.01
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Abstract

Superhydrophobic surface, with a water contact angle greater than $150^{\circ}$, has a self-cleaning effect termed 'Lotus effect'. This surface is created by the combination of rough surface and the low surface energy. We proposed square pillar and square shapes to control surface roughness. Microstructure arrays are fabricated by DRIE(Deep Reactive Ion Etching) process and followed by PPFC(Plasma Polymerized Fluorocarbon) deposition. On the experimental result, contact angle at square pillar arrays is well matched with Cassie's model and largest contact angle is $173.37^{\circ}$. But contact angle of square pore shape arrays is lower than Cassie's theoretical contact angle about $5{\sim}10%$. Nevertheless, square pore arrays have more rigidity than square pillar arrays.

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References

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