Fabrication of metal nanodots and nanowires by atomic force microscopy nanomachining

The fabrication of metal nanostructures by a combination of atomic force microscopy nanomachining on a thin polymer resist, metal coating and lift-off is reported. Nanodots with sizes and nanowires with widths ranging between 50 and 100 nm have been successfully created. The present work exemplifies the feasibility and effectiveness of using a single-layer resist in comparison with a two-layer resist. In addition, the localized surface plasmon resonance peaks of the metal nanostructures have been measured and the selective growths of zinc oxide nanowires on the metal nanostructures are demonstrated.