Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 4
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- Pages.39-42
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- 2007
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- 1738-2270(pISSN)
Thermal Performance Analysis of Circular Source for OLED Vapor Deposition
OLED 증착용 서큘러소스의 열적성능 해석
- Joo, Young-Cheol (Dept. of Mechanical Engineering, Soonchunhyang University) ;
- Han, Choong-Hwan (Dept. of Mechanical Engineering, Graduate School, Soonchunhyang University) ;
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Um, Tai-Joon
(Dept. of Mechanical Engineering, Soonchunhyang University) ;
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Lee, Sang-Wook
(Dept. of Mechanical Engineering, Soonchunhyang University) ;
- Kim, Kug-Weon (Dept. of Mechanical Engineering, Soonchunhyang University)
- 주영철 (순천향대학교 기계공학과) ;
- 한충환 (순천향대학교 대학원 기계공학과) ;
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엄태준
(순천향대학교 기계공학과) ;
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이상욱
(순천향대학교 기계공학과) ;
- 김국원 (순천향대학교 기계공학과)
- Published : 2007.12.30
Abstract
Temperature distribution of the circular heat source was studied by analyzing the heat transfer of the environment of the circular source for OLED. Circular nozzle source was used to fabricate thin organic layer as the organic material in it was heated, vaporized and deposited to the large size panel. A modified heater structure of circular source has been suggested. The results of numerical analysis shows that the modified heater structure can use 15% more powder in a batch than the original heater structure does. Moreover, the modified heater structure can improve the uniformity of organic vapor deposition by controlling the temperature.