반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제6권4호
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- Pages.23-27
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- 2007
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- 1738-2270(pISSN)
저속 회전 스테이지의 5자유도 회전축 오차 분석에 관한 연구
A Study on the Analysis of 5-DOF Axis of Rotation Error in Low Speed Rotary Stage
-
한창수
(한양대학교 기계공학과) ;
- 김진호 (한양대학교 기계공학과) ;
- 신동익 (한양대학교 대학원) ;
-
윤덕원
(한양대학교 대학원) ;
- 이융기 (한양대학교 대학원) ;
-
이상무
(한국생산기술연구원) ;
-
남경태
(한국생산기술연구원)
-
Han, Chang-Soo
(Dept. Of Mechanical engineering in Hanyang University) ;
- Kim, Jin-Ho (Dept. Of Mechanical engineering in Hanyang University) ;
- Shin, Dong-Ik (Graduate school of Hanyang University) ;
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Yun, Deok-Won
(Graduate school of Hanyang University) ;
- Lee, Yung-Gi (Graduate school of Hanyang University) ;
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Lee, Sang-Moo
(Korea Institute of Industrial Technology) ;
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Nam, Gyung-Tai
(Korea Institute of Industrial Technology)
- 발행 : 2007.12.30
초록
Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.
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