반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제6권4호
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- Pages.11-15
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- 2007
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- 1738-2270(pISSN)
Ar-Kr 혼합가스를 이용한 OLED용 Al 전극 제작
Preparation of Al electrode with Ar-Kr gas mixture for OLED application
- Kim, Sang-Mo (Department of Electrical Engineering, Kyungwon University) ;
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Jang, Kyung-Wook
(Department of Electrical Engineering, Kyungwon University) ;
- Lee, Won-Jae (Department of Electronics Engineering, Kyungwon University) ;
- Kim, Kyung-Hwan (Department of Electrical Engineering, Kyungwon University)
- 발행 : 2007.12.30
초록
As preparing electrode for the OLED with the sputtering process, in order to be lower damage of the bottom organic layer and increase the life-time of the OLED, we prepared Al electrode for that by using Facing Targets Sputtering (FTS) system. Al electrode directly deposited on the cell (LiF/EML/HTL/Bottom electrode). Deposition condition was the working gas (Ar, Kr and Ar+Kr) and working gas pressure (1 and 6 mTorr). The film thickness and I-V curve of Al/cell were evaluated by a