한국산학기술학회논문지 (Journal of the Korea Academia-Industrial cooperation Society)
- 제8권2호
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- Pages.207-211
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- 2007
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- 1975-4701(pISSN)
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- 2288-4688(eISSN)
단결정$(Al_2O_3)$ 성장 노(爐)의 온도 조절용 GAS압력 제어기의 구현
The Embodiment of GAS Pressure Controller for Temperature Control of Sing Crystal $(Al_2O_3)$ Growing Furnace
초록
본 논문에서는 단결정
It is a quite quality concerning to control the temperature of single crystalline growth as it does when we get most of heat treating products. It is also important factor to control the temperature when we make the