Effect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Films

  • Kim, Su-Han (School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center, Seoul National University) ;
  • Char, Kook-Heon (School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center, Seoul National University) ;
  • Hahn, Jun-Hee (Division of Chemical Metrology & Materials Evaluation, Korea Research Institute of Standards and Science) ;
  • Lee, Jin-Kyu (Department of Chemistry, Seoul National University) ;
  • Yoon, Do-Yeung (Department of Chemistry, Seoul National University) ;
  • Rhee, Hee-Woo (Department of Chemical Engineering, Sogang University) ;
  • Jin, Moon-Young (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • 발행 : 2007.02.28

초록

키워드

참고문헌

  1. The International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA, 2001
  2. C. V. Nguyen, K. R. Carter, C. J. Hawker, J. L. Hedrick, R. L. Jaffe, R. D. Miller, J. F. Remenar, H. W. Rhee, P. M. Rice, M. F. Toney, M. Trollsas, and D. Y. Yoon, Chem. Mater., 11, 3080 (1999)
  3. Y. Toivola, S. Kim, R. F. Cook, K. Char, J. K. Lee, D. Y. Yoon, H. W. Rhee, S. Y. Kim, and M. Y. Jin, J. Electrochem. Soc., 151, F45-F53 (2004)
  4. Q. R. Huang, W. Volksen, E. Huang, M. Toney, C. W. Frank, and R. D. Miller, Chem. Mater., 14, 3676 (2002)
  5. S. Yang, P. A. Mirau, C. S. Pai, O. Nalamasu, E. Reichmanis, J. C. Pai, Y. S. Obeng, J. Seputro, E. K. Lin, H. J. Lee, J. N. Sun, and D. W. Gidley, Chem. Mater., 14, 369 (2002)
  6. J. H. Yim, Y. Y. Lyu, H. D. Jeong, S. A. Song, I. S. Hwang, J. Hyeon-Lee, S. K. Mah, S. Chang, J. G. Park, Y. F. Hu, J. N. Sun, D. V. Gidley, Adv. Funct. Mater., 13, 382 (2003) https://doi.org/10.1002/adfm.200304287
  7. J. H. Yim, M. R. Baklanov, D. W. Gidley, H. G. Peng, H. D. Jeong, and L. S. Pu, J. Phys. Chem. B, 108, 8953 (2004) https://doi.org/10.1021/jp035904w
  8. J. H. Yim, J. B. Seon, T. D. Jeong, L. Y. S. Pu, M. R. Baklanov, and D. W. Gidley, Adv. Funct. Mater., 14, 277 (2004) https://doi.org/10.1002/adfm.200305019
  9. A. M. Padovani, L. Rhodes, S. A. B. Allen, and P. A. Kohl, J. Electrochem. Soc., 149, F161 (2002)
  10. A. M. Padovani, L. Rhodes, S. A. B. Allen, and P. A. Kohl, J. Electrochem. Soc., 149, F171 (2002)
  11. S. Z. Yu, T. K. S. Wong, X. Hu, K. Pita, and V. Ligatchev, J. Electrochem. Soc., 151, F123 (2004)
  12. B. D. Lee, Y. H. Park, Y. T. Hwang, W. Oh, J. Yoon, and M. Ree, Nature Materials, 4, 147 (2005) https://doi.org/10.1038/nmat1303
  13. H. W. Ro, K. J. Kim, P. Theato, D. W. Gidley, and D. Y. Yoon, Macromolecules, 38, 1031 (2005)
  14. B. J. Char, S. Kim, and K. Char, Macromol. Res., 13, 176 (2005)
  15. Y. Kawakami, Y. Li, Y. Liu, M. Seino, C. Pakjamsai, M. Oishi, Y. H. Cho, and I. Imae, Macromol. Res., 12, 156 (2004)
  16. G. Socrates, Infrared and Raman Group Characteristic Frequencies, John Wiley & Sons, New York, 2001