Effect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Films

  • Kim, Su-Han (School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center, Seoul National University) ;
  • Char, Kook-Heon (School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center, Seoul National University) ;
  • Hahn, Jun-Hee (Division of Chemical Metrology & Materials Evaluation, Korea Research Institute of Standards and Science) ;
  • Lee, Jin-Kyu (Department of Chemistry, Seoul National University) ;
  • Yoon, Do-Yeung (Department of Chemistry, Seoul National University) ;
  • Rhee, Hee-Woo (Department of Chemical Engineering, Sogang University) ;
  • Jin, Moon-Young (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • Published : 2007.02.28

Abstract

Keywords

References

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