한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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3극 전계방출 전자총의 정전기 렌즈에 의한 전자빔 거동

Electron Beam Behaviors by the Electrostatic Lens in Triode Field Emission Gun

  • 김충수 (서울대학교 기계항공공학과) ;
  • 김동환 (서울산업대 기계설계자동화공학과) ;
  • 박만진 (서울대학교 기계항공공학부) ;
  • 장동영 (서울산업대 기계설계자동화공학과) ;
  • 한동철 (서울대학교 기계항공공학부)
  • 발행 : 2007.12.15
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초록

A field emission electron gun including 3 electrodes including one cathode and two anodes is very important for high resolution electron microscope. To have functions to control the initially-emitted electron beam, two anodes act as an electrostatic lens according to equipotential lines by adjusting the spot size, intensity, and working distance. To verify the action of the electron beam by the electrostatic lens by changing several parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated and then their performances were analyzed with angular beam intensity(distribution), electrical optic axis variation and their stability.

키워드

참고문헌

  1. Crewe, A. V., Eggenberger, D. N., Wall, J. and Welter, L. M., 1968, 'Electron gun using field emission source' Rev. of Sci. Instrum., Vol. 39, No. 4, pp. 576-583 https://doi.org/10.1063/1.1683435
  2. Harker, K. J., 1960, 'Determination of electrode shapes for axially symmetric electron guns, J. Applied Physics, Vol. 31, No. 12, pp. 2165-2170 https://doi.org/10.1063/1.1735518
  3. Gomer, R., 1961, Field emission and field ionization, Harvard University Press, Cambridge, pp. 47-52
  4. Orloff, J., 1977, Hand book of charged particle optics, CRC press, NewYork, pp. 3-5
  5. EL, A. B. and EL, J. C. J., 1970, Electron beams, lenses and optics vol. 1, Academic press, New York and London, pp. 60-65