Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
권호 표지
DOI QR코드

DOI QR Code

The Tribological Behaviors of Mesoporous $SiO_2$ Thin Film Formed by Sol-Gel and Self-Assembly Method

졸겔법과 자가조립법을 통해 제조된 메조포러스 $SiO_2$ 박막의 트라이볼로지 특성

  • Lee, Young-Ze (Dept. of Mechanical Engineering, Sungkyunkwan University) ;
  • Shin, Yun-Ha (Dept. of Mechanical Engineering, Sungkyunkwan University) ;
  • Kim, Ji-Hoon (Dept. of Mechanical Engineering, Sungkyunkwan University) ;
  • Kim, Ji-Man (Department of Chemistry, Sungkyunkwan University) ;
  • Kim, Tae-Sung (Dept. of Mechanical Engineering, Sungkyunkwan University)
  • 이영제 (성균관대학교 기계공학부) ;
  • 신윤하 (성균관대학교 기계공학부) ;
  • 김지훈 (성균관대학교 기계공학부) ;
  • 김지만 (성균관대학교 화학과) ;
  • 김태성 (성균관대학교 기계공학부)
  • Published : 2007.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

Frictional characteristics of mesoporous $SiO_2$ thin films were evaluated with different pore sizes. The films were manufactured by sol-gel and self-assembly methods to have a porous structure. The pores on the surface may play as the outlet of wear particle and the storage of lubricant so that the surface interactions could be improved. The pores were exposed on the surface by chemical mechanical polishing (CMP) or plasma-etching after forming the porous films. The ball-on-disk tests with mesoporous $SiO_2$ thin films on glass specimen were conducted at sliding speed of 15 rpm and a load of 0.26 N. The results show considerable dependency of friction on pore size of mesoporous $SiO_2$ thin films. The friction coefficient decreased as increasing the pore size. CMP process was very useful to expose the pores on the surface.

Keywords

References

  1. D.R. Uhlmann., T. Suratwala., K. Davidson., J.M. boulton. and G. Teowee., 'Sol-Gel Derived Coating on Glass,' J. Non-Crystalline Solids., Vol. 218, pp. 113-122, 1997 https://doi.org/10.1016/S0022-3093(97)00162-2
  2. H. Dislich., 'Glassy and Crystalline Systems from Gels: Chemical Basis and Technical Application,' J. Non-Crystalline Solids., Vol. 57, pp. 371-388, 1983 https://doi.org/10.1016/0022-3093(83)90425-8
  3. C. T. Kresge, M. E. Leonowicz, W. J. Roth, J. C. Vartuli and J. S. Beck, 'Ordered Mesoporous Molecular Sieves Synthesized by a Liquid-Crystal Template Mechanism,' Nature, Vol. 359, pp. 710-712, 1992 https://doi.org/10.1038/359710a0
  4. J. Y. Ying, C. P. Mehnert and M. S. Wong, 'Synthesis and Applications of Supramolecular- Templated Mesoporous Materials,' Chem. Int. Ed., Vol. 38, pp. 56-77, 1999 https://doi.org/10.1002/(SICI)1521-3773(19990115)38:1/2<56::AID-ANIE56>3.0.CO;2-E
  5. C.W. Cho and Y. Z. Lee, 'Friction Transition Diagram Considering the Effects of Oxide Layer Formed on Wear Track of AISI 1045 Steel Disk against TiN Coated AISI 52100 Steel Ball in Sliding,' Wear, Vol. 179, pp. 1-9, 2004 https://doi.org/10.1016/0043-1648(94)90210-0