참고문헌
- Gray P.R. and Meyer R.G., 'Future directions in silicon ICs for RF personal communications', Proceedings of the IEEE 1995 Custom Integrated Circuits Conference, pp. 83 - 90, 1-4 May. 1995
- Lakin K.M., Kline G.R., and McCarron K.T., 'Development of miniature filters for wireless applications', IEEE Transactions on Microwave Theory and Techniques, Volume 43, Issue 12, Part 2, pp. 2933 - 2939, Dec. 1995 https://doi.org/10.1109/22.475658
- Sang-Hee Kim, Jong-Heon Kim, Hee-Dae Park, and Giwan Yoon, 'AIN-based film bulk acoustic resonator devices with W/SiO2 multilayers reflector for rf bandpass filter application', J. Vac. Sci. Technol. B 19(4), pp. 1164-1168, Jul/Aug 2001 https://doi.org/10.1116/1.1385685
- Park J.Y., Lee H.C., Lee K.H., Lee H.M., Ko Y.J., Shin J.H., Moon S.H., and Bu J.U., 'Micromachined FBAR RF filters for advanced handset applications' 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 2003
- Driscoll M.M., Moore R.A., Rosenbaum J.F., Krischnaswamy S.V., and Szedon J.R., 'Recent Advances in Monolithic Film Resonator Technology' IEEE 1986 Ultrasonics Symposium, pp. 365 - 370, 1986
- Hara M., Kuypers J., Abe T., and Esashi M., 'MEMS based thin film 2 GHz resonator for CMOS integration', 2003 IEEE MTT-S International Microwave Symposium Digest, Volume 3,pp. 1797 - 1800, 8-13 June 2003
- Motoaki Hara, Jan Kuypers, Takashi Abe, and Masayoshi Esashi, 'Surface micromachined A1N thin film 2 GHz resonator for CMOS integration', Sensors and Actuators A: Physical, Volume 117, Issue 2, pp.211-216, 14 January 2005 https://doi.org/10.1016/j.sna.2004.06.014
- C. H. Tai, T. K. Shing, Y. D. Lee, and C. C. Tien, 'A Novel Thin Film Bulk Acoustic Resonator Duplexer for Wireless Applications', Tamkang Journal of Science and Engineering, Vol. 7, No. 2, pp. 67-71, 2004
- B. Drafts, 'Acoustic wave technology sensors', IEEE Microwave Theory and Techniques, vol.49, pp. 795-802, 2001 https://doi.org/10.1109/22.915466
- S. - H. Park et al., 'Film Bulk Acoustic Resonator Fabrication for Radio Frequency Filter Applications,' Jpn. J. Appl. Phys. vol.39, pp. 4115-4119, 2000 https://doi.org/10.1143/JJAP.39.4115
- R. C. Ruby et al., 'PCS 1900MHz duplexer using thin film bulk acoustic resonators (FBARs)', IEE Electron. Lett.,vol. 35, pp. 794-795, 1999 https://doi.org/10.1049/el:19990559