DOI QR코드

DOI QR Code

Electro-Chemical Properties of Iridium Oxide Coated Ti Electrode Synthesized by Unbalanced Magnetron Sputtering Process

비대칭 마크네트론 스퍼터링을 이용한 이리듐 산화물 박막의 합성과 전기 화학적 특성분석

  • Published : 2007.10.31

Abstract

Preliminary studies were conducted to develop a dimensionally stable anode (DSA)electrode prepared by reactive sputtering method. The microstructure, surface morphology and electrochemical properties of iridium oxide $(IrO_2)$ coatings synthesized by unbalanced magnetron sputtering (UBMS) and conventional DSA electrode were compared. In addition, the possibilities of $IrO_2$ films synthesized by UMB on a real DSA electrode were investigated by electro-chemical application test. The degree of non-stoichiometry and surface area were closely related to the electro-chemical activity of the $IrO_2$ electrode. The feasibility of making a DSA electrode prepared by PVD technique was demonstrated through the present work.

Keywords

References

  1. S. Trasatti, Electrochim. Acta, 46 (2000) 2377-2385
  2. C. Comniellis, Electrochim. Acta, 39 (1994) 1857
  3. C. Bock, H. Spinney, B. MacDougall, J. Appl. Electrochem., 30 (2000) 523 https://doi.org/10.1023/A:1003961701335
  4. J. Krysa, L. Kule, R. Mraz, I. Rousar, J. Appl. Electrochem., 26 (1996) 1996
  5. R. Kotz, H. J. Lewerenz, S. Stucki, J. Electrochem. Soc., 130 (1983) 825 https://doi.org/10.1149/1.2119829
  6. D. Galizzioli, F. Tantardini, S. Trasatti, J. Appl. Electrochem., 5 (1975) 203 https://doi.org/10.1007/BF01637270
  7. D. Galizzioli, F. Tantardini, S. Trasatti, J. Appl. Electrochem., 4 (1974) 57 https://doi.org/10.1007/BF00615906
  8. R. S. Teo, J. Orehotsky, W. Visscher, S. Srinivasan, J. Electrochem. Soc., 128 (1981) 1900 https://doi.org/10.1149/1.2127761
  9. D. Depla, R. De Gryse, Surface and Coatings Technology, 183 (2004) 196-203 https://doi.org/10.1016/j.surfcoat.2003.10.008
  10. J. F. Moulder, W. F. Stickle, P. E. Sobol, K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Eden Prairie, 1992) p. 178
  11. M. Hara, K. Asami, K. Hashimoto, T. Masumoto, Electrochim. Acta, 28 (1983) 1073 https://doi.org/10.1016/0013-4686(83)80011-5