Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Surface acoustic wave gas sensors by assembling gas chromatography column

가스 크로마토그래피를 부착한 표면탄성파 가스 센서

  • Yoo, Beom-Keun (Thin Film Material Research Center, Korea Institute of Science and Technology) ;
  • Park, Yong-Wook (Namseoul University) ;
  • Kang, Chong-Yun (Thin Film Material Research Center, Korea Institute of Science and Technology) ;
  • Yoon, Seok-Jin (Thin Film Material Research Center, Korea Institute of Science and Technology) ;
  • Choi, Doo-Jin (Yonsei University) ;
  • Kim, Jin-Sang (Thin Film Material Research Center, Korea Institute of Science and Technology)
  • 유범근 (한국과학기술연구원 박막재료연구센터) ;
  • 박용욱 (남서울대학교 전자공학과) ;
  • 강종윤 (한국과학기술연구원 박막재료연구센터) ;
  • 윤석진 (한국과학기술연구원 박막재료연구센터) ;
  • 최두진 (연세대학교 신소재공학과) ;
  • 김진상 (한국과학기술연구원 박막재료연구센터)
  • Published : 2007.01.31
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Abstract

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as acetone, methanol, and ethanol by measuring phase shift of output signal. A delay-line by combining with a center frequency of 200 MHz was fabricated on S-T Quartz substrates. Using gas chromatography column, the selectivity of the SAW gas sensor were introduced. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. This SAW gas sensor system may be well suited for a high performance electronic nose system.

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References

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