Applied Microscopy
- 제36권spc1호
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- Pages.25-33
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- 2006
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- 2287-5123(pISSN)
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- 2287-4445(eISSN)
A New Trend of In-situ Electron Microscopy with Ion and Electron Beam Nano-Fabrication
- Furuya, Kazuo (National Institute for Materials Science(NIMS)) ;
- Tanaka, Miyoko (National Institute for Materials Science(NIMS))
- 발행 : 2006.06.30
초록
Nanofabrication with finely focused ion and electron beams is reviewed, and position and size controlled fabrication of nano-metals and -semiconductors is demonstrated. A focused ion beam (FIB) interface attached to a column of 200keV transmission electron microscope (TEM) was developed. Parallel lines and dots arrays were patterned on GaAs, Si and
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