금도금 방법으로 제작한 코일을 이용한 초소형 발전기의 저주파 진동 특성분석

Characterization of a Micro Power Generator using a Fabricated Electroplated Coil Measured at Low Frequency

We have designed and fabricated coil structures by gold electroplating technique. The thickness, width, and length are $7{\mu}m,\;20{\mu}m$, and 1.6m, respectively. With vibrating a magnet on the surface of a fabricated electroplated coil, the micro power generator produce an alternating voltage. We have changed the vibrational frequency from 0.5Hz to 8Hz. The generated voltage was 106mV at 3Hz and 198mV at 6Hz. We have rectified and stepped up the input voltage using a quadrupler circuit. After using the step up circuit, the measured voltage was 81mV at 3Hz and 235mV at 6Hz.