Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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A Micro Tribotester for MEMS Elements

  • Kim Choong-Hyun (Tribology Research center, KIST) ;
  • Ahn Hyo-Sok (Department of Die and Mould Design, Seoul National Univ. of Technology)
  • Published : 2006.08.01
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Abstract

A computer-controlled micro tribotester has been developed to investigate the friction and wear characteristics of thin coatings, which can be applied to silicon-based materials. In the developed system, a step motor gives a reciprocating movement and an electromagnet applies a load between a ball and a plate specimen. Test results confirmed that the application of load in the range of $0.03{\sim}1.8N$ and with a sliding speed of $4.44{\sim}7.70mm/s$ was successfully accomplished. Advantages of the developed micro tribotester are: (1) realization of micro load and displacement applicable to micro electromechanical systems(MEMS) using DC motor and electromagnet (2) continuously variable load and reciprocating speed; and (3) high reliability, which allows for unattended use for long periods.

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References

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