References
- F. J. Yusta, M. L. Hitchman, and H. Shamlian, 'CVD preparation and characterization of tin dioxide films for electrochemical application', J. Mater. Chem., Vol. 7, No.8, p. 1421, 1997
- E. Shanthi, V. Dutta, A. Banerjeer, and K. L. Chopra, 'Electrical and optical properties of undoped and antimony doped tin oxide films', J. Appl. Phys., Vol. 51, No. 12, p. 6243, 1981
- D. Belanger, J. P. Dodelet, B. A. Lombos, and J. I. Dickson, 'Thickness dependence of transport properties of doped poly crystalline tin oxide films', J. Electrochem. Soc., Vol. 132, No.6, p. 1398, 1985 https://doi.org/10.1149/1.2114266
-
K. H. Kim and C. G. Park, 'Electrical properties and gas sensing behavior
$SnO_2$ films prepared by chemical vapor deposition', J. Electrochem. Soc., Vol. 138, No.8, p. 2408, 1991 - K. Ihokura and J. Watson, 'The stannic oxide gas sensor principles and applications', CRC Press, Boca Raton., FL, 1994
-
J. I. Jung, B. C. Kim, S. H. Chang, and J. J. Kim, 'Effect of sintering atmosphere and dopant addition on the densification of
$SnO_2$ ceramics', J. Kor. Ceram. Soc., Vol. 34, p. 1221, 1997 - J. Kane, H. P. Schweizer, and W. Kern, 'Chemical vapor deposition of antimony-doped tin oxide films formed from dibutyl tin diacetate', J. Electrochem. Soc., Vol. 123, No.2, p, 270, 1976 https://doi.org/10.1149/1.2132802
- S. Shanthi, C. Subramanian, and P. Ramasamy, 'Growth and characterization of antimony doped tin oxide thin films', J. Crystal Growth, Vol. 197, p. 858, 1999
- G. Shanon, R. Rup, and A. Mansingh, 'Growth and characterization of tin oxide films prepared by chemical vapour deposition', Thin Solid Films, Vol. 190, No.2, p. 287, 1990
-
S. Shirakata, A. Yokoyama, and S. Isomura, 'Preparation of
$SnO_2$ thin films by plsma-assisted metalorganic chemical vapor deposition', Jpn, J. Appl. Phys., Vol. 35, p. 722, 1996 https://doi.org/10.1143/JJAP.35.L722 -
정 진, 최승평, 신동찬, 구재본, 송호준, 박진성 '열 CVD법으로 증착된
$SnO_2$ 박막의 미세구조와 전기적 특성', 전기전자재료학회논문지, 16권, 5호, p. 441, 2003 -
J. Vetrone and Y. W. Chung, 'Organometallic chemical vapor deposition of
$SnO_2$ single crystal and polycrystalline films', J. Vac. Sci. Technol. A, Vol. 9, No.6, p. 3041, 1991 https://doi.org/10.1116/1.577441