반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제5권1호
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- Pages.13-16
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- 2006
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- 1738-2270(pISSN)
필터용 AIN 압전 박막의 제작
Preparation of AIN piezoelectric thin film for filters
- Keum Min-Jong (Dept. Materials Engineering, Korea University of Technology and Education) ;
- Kim Yeong-Cheol (Dept. Materials Engineering, Korea University of Technology and Education) ;
- Seo Hwa-Il (School of Information Technology, Korea University of Technology and Education) ;
- Kim Kyung-Hwan (Dept. Electrical & Information Eng. Kyungwon University)
- 발행 : 2006.03.01
초록
AIN thin films were prepared on amorphous glass and