한국레이저가공학회지 (Laser Solutions)
- 제9권2호
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- Pages.11-15
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- 2006
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- 1229-0963(pISSN)
스캐너를 이용한 고속 펨토초 레이저 가공 기술
High-Speed Femtosecond Laser Micromachining with a Scanner
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손익부
(광주과학기술원 고등광기술연구소) ;
- 최성철 (광주과학기술원 고등광기술연구소) ;
-
노영철
(광주과학기술원 고등광기술연구소) ;
-
고도경
(광주과학기술원 고등광기술연구소) ;
- 이종민 (광주과학기술원 고등광기술연구소)
-
Sohn, Ik-Bu
(Advanced Photonics Research Institute, GIST) ;
- Choi, Sung-Chul (Advanced Photonics Research Institute, GIST) ;
-
Noh, Young-Chul
(Advanced Photonics Research Institute, GIST) ;
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Ko, Do-Kyeong
(Advanced Photonics Research Institute, GIST) ;
- Lee, Jong-Min (Advanced Photonics Research Institute, GIST)
- 발행 : 2006.09.30
초록
We report experimental results on the high-speed micromachining using a femtosecond laser (800 nm, 130 fs, 1kHz) and galvanometer scanner system (Raylase, Germany). Periodic hole drilling of silicon and glass with the scan speed of 1-20 mm/s is demonstrated. Finally, we demonstrate the utility of the femtosecond laser application to ITO patterning by using a high-speed femtosecond laser scanner system.