참고문헌
- J. J. Yao, 'RF MEMS from a device perspective', J. Micromech. Microeng., vol. 10, pp. R9-R38, 2000 https://doi.org/10.1088/0960-1317/10/4/201
- C. L. Goldsmith, Z. Yao, S. Eshelman, and D. Denniston, 'Performance of low-loss RF MEMS capacitive switches', IEEE Microwave Guided Wave Lett., vol. 8, no. 8, pp. 269-271, Aug. 1998 https://doi.org/10.1109/75.704410
- C. Goldsmith, J. Randall, S. Eshelman, T. H. Lin, D. Denniston, S. Chen, and B. Norvell, 'Characteristics of micromachined switches at microwave frequencies', IEEE MTT-S Int. Microwave Symp. Dig., San Francisco, CA, pp. 1141-1144, Jun. 1996
- J. J. Yao, M. F. Chang, 'A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz', Int. Conf. Solid-State Sens. Actuators Dig., Stockholm, Sweden, pp. 384-387, Jun. 1995
- G. M. Rebeiz, J. B. Muldavin, 'RF MEMS switches and switch circuits', IEEE Microwave Mag., vol. 2, pp. 59-71, Dec. 2001 https://doi.org/10.1109/6668.969936
- E. R. Brown, 'RF-MEMS switches for reconfigurable integrated circuits', IEEE Trans. Microwave Theory Tech., vol. 46, pp. 1868-1880, Nov. 1998 https://doi.org/10.1109/22.734501
- K. E. Petersen, 'Dynamic micromechanics on silicon: techniques and devices', IEEE Trans. Electron Devices, vol. 25, no. 10, pp. 1241-1250, Oct. 1978 https://doi.org/10.1109/T-ED.1978.19259
- L. E. Larson, R. H. Hackette, and R. F. Lohr, 'Microactuators for GaAs-based microwave integrated circuits', Transducers'91 Int. Conf. Solid-State Sens. Actuators Dig., San Francisco, CA, pp. 743-746, Jun. 1991
- S. P. Pacheco, L. P. B. Katehi, and T. C. Nguyen, 'Design of low actuation voltage RF MEMS switch', IEEE MTT-S Int. Microwave Symp. Dig., pp. 165-168, 2000
- Z. J. Yao, S. Chen, S. Eshelman, D. Denniston, and C. Goldsmith, 'Micromachined low-loss microwave switches', IEEE J. Microelectromech. Syst., vol. 8, no. 2, pp. 129-134, Jun. 1999 https://doi.org/10.1109/84.767108
- D. Peroulis, K. Sarabandi, and L. P. B. Katehi, 'Low contact resistance series MEMS switches', IEEE MTT-S Int. Microwave Symp. Dig., pp. 223-226, 2002
- S. Duffy, C. Bozler, S. Rabe, J. Knecht, L. Travis, P. Wyatt, C. Keast, and M. Gouker, 'MEMS microswitches for reconfigurable microwave circuitry', IEEE Microwave Wireless Comp. Lett., vol. 11, pp. 106-108, Mar. 2001 https://doi.org/10.1109/7260.915617
- J. B. Muldavin, G. M. Rebeiz, 'High-isolation CPW MEMS shunt switches-part 1: modeling', IEEE Trans. Microwave Theory and Techniques, vol. 48, no. 6, pp. 1045-1052, Jun. 2000 https://doi.org/10.1109/22.904743
- D. Hyman, M. Mehregany, 'Contact physics of gold microcontacts for MEMS switches', IEEE Trans. Comp. Packag. Technol., vol. 22, no. 3, pp. 357-364, Sep. 1999 https://doi.org/10.1109/6144.796533
- M. Kim, J. B. Hacker, R. E. Mihailovich, and J. F. DeNatale, 'A DC-to-40 GHz four-bit RF-MEMS true-time delay network', IEEE Microwave Wireless Comp. Lett., vol. 11, no. 2, pp. 56-58, Feb. 2001 https://doi.org/10.1109/7260.914301
- J. Y. Park, G. H. Kim, K. W. Chung, and J. U. Bu, 'Monolithically integrated micromachined RF MEMS capacitive switches', Sens. Actuators A, vol. 89, pp. 88-94. 2001 https://doi.org/10.1016/S0924-4247(00)00549-5
- F. Plotz, S. Michaelis, R. Aigner, H. J. Timme, J. Binder, and R. Noe, 'A low-voltage torsional actuator for application in RF-microswitches', Sens. Actuators A, vol. 92, pp. 312-317, 2001 https://doi.org/10.1016/S0924-4247(01)00589-1
- J. M. Huang, K. M. Liew, C. H. Wong, S. Rajendran, M. J. Tan, and A. Q. Liu, 'Mechanical design and optimization of capacitive micromachined switch', Sens. Actuators A, vol. 93, pp. 273-285, 2001 https://doi.org/10.1016/S0924-4247(01)00662-8
- W. P. Taylor, M. G. Allen, 'Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices', Transducers'97 Int. Conf. Solid-State Sens. Actuators Dig., Chicago, pp. 1149-1152, Jun. 1997
- H. A. C. Tilmans, E. Fullin, H. Ziad, M. D. J. Van de peer, J. Kesters, E. V. Geffen, J. Bergqvist, M. Pantus, E. Beyne, K. Baert, and F. Naso, 'A fully-packaged electromagnetic microrelay', IEEE Micro Electro Mechanical Systems, Orlando, Florida, Jan. 1999
- X. Q. Sun, K. R. Farmer, and W. N. Carr, 'A bistable microrelay based on two-segment multimorph cantilever actuators', IEEE Micro Electro Mechanical Systems, Heidelberg, Germany, Jan. 1998
- L. E. Larson, R. H. Hackett, M. A. Melendes, and R. F. Lohr, 'Micromachined microwave actuator (MIMAC) technology- a new tuning approach for microwave integrated circuits', IEEE MTT-S Int. Microwave Symp. Dig., pp. 27-30, Jun. 1991
- K. J. Rangra, F. Giacomozzi, B. Margesin, L. Lorenzelli, V. Mulloni, C. Collini, R. Marcelli, and G. Soncini, 'Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization', Int. Semiconductor Conf., 2004
- S. A. Frang, E. A. Sani, 'A low voltage capacitive micromachined microwave switch', ICSE, Penang, Malaysia, pp. 110-114, Dec. 2002
- P. R. Scheeper, W. Olthuis, and P. Bergveld, 'The design, fabrication, and testing of corrugated silicon nitride diaphragms', J. Microelectromechanical Syst., vol. 3, no. 1, pp. 36-42, 1994 https://doi.org/10.1109/84.285722
- M. Fuldner, A. Dehe, and R. Lerch, 'Analytical analysis and finite element simulation of advanced membranes for silicon microphones', IEEE Sensors Journal, vol. 5, no. 5, pp. 857-863, Oct. 2005 https://doi.org/10.1109/JSEN.2004.841449
- H. Yan, E. S. Kim, 'Corrugated diaphragm for piezoelectric microphone', IEEE EFTA, pp. 503-506, 1996
- M. Giovanni, Flat and Corrugated Diaphragm Design Handbook, Marcel Dekker Inc., New York, 1982
- D. L. Logan, Mechanics of Materials, Harper Collins Publishers, New York, 1991
- J. M. Gere, S. P. Timoshenko, Mechanics of Materials, 4th Edition, PWS Publishing Company, Boston, 1997
- W. C. Young, R. G. Budynas, Roark's Formulas for Stress and Strain, 7th Edition, McGraw-Hill, New York, 2002
- G. M. Rebeiz, RF MEMS Theory, Design, and Technology, John Wiley & Sons Inc., New Jersey, 2003
- Y. T. Song, H. Y. Lee, and M. Esashi, 'Resonance-free millimeter-wave coplanar waveguide Si microelectromechanical system package using a lightly-doped silicon chip carrier', Japanese Journal of Applied Physics, vol. 44, no. 4A, pp. 1693-1697, 2005 https://doi.org/10.1143/JJAP.44.1693
- Y. T. Song, H. Y. Lee, and M. Esashi, 'Parasitic leakage resonance-free HRS MEMS package for microwave and millimeter-wave', Sensors and Actuators A, vol. 126, pp. in press, 2006
- Y. T. Song, H. Y. Lee, and M. Esashi, 'Low actuation voltage capacitive shunt RF-MEMS switch having a corrugated bridge', IEICE Trans. Electron., accepted, Jun. 2006
- Y. T. Song, H. Y. Lee, and M. Esashi, 'A corrugated bridge of low residual stress for RFMEMS switch', Sensors and Actuators A, under review, Apr. 2006