Journal of Electrical Engineering and Technology

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지
DOI QR코드

DOI QR Code

Large Displacement Polymer Bimorph Actuator for Out-of-Plane Motion

  • Jeung Won-Kyu (Development Center, Central R&D Institute Samsung Electro-Mechanics) ;
  • Choi Seog-Moon (School of Electrical and Mechanical Engineering, Yonsei University) ;
  • Kim Yong-Jun (School of Electrical and Mechanical Engineering, Yonsei University)
  • Published : 2006.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

Keywords

References

  1. Conway, N.J. Sang-Gook Kim, 'Large-strain, piezoelectric, in-plane micro-actuator' Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on MEMS, pp. 454 - 457, Jan. 2004
  2. Bhuiyan, M.M.I. Haga, Y. Esashi, M. 'Large displacement optical switching mechanism using SMA microactuator and magnetic latch' Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on MEMS, pp. 61 - 64, Jan. 2004
  3. Rashidian, B. Allen, M.G. 'Electrothermal micro-actuators based on dielectric loss heating' MEMS '93,Proceedings 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, pp. 24 - 29, Feb. 1993
  4. Riethmuller W., Benecke W., 'Thermally excited silicon microactuators' Electron Devices, IEEE Transactions on MEMS. Volume 35, Issue: 6, pp. 758 - 763, June 1988 https://doi.org/10.1109/16.2528

Cited by

  1. Electrical and structural properties of 0.98(Na0.5K0.5)NbO3-0.02LiSbO3 ceramics with ZnO content vol.60, pp.7, 2012, https://doi.org/10.3938/jkps.60.1114
  2. Thermally Induced Strain-Coupled Highly Stretchable and Sensitive Pyroelectric Nanogenerators vol.5, pp.18, 2015, https://doi.org/10.1002/aenm.201500704
  3. Electrical and Structural Properties of 0.98(Na0.5K0.5)NbO3–0.02Ba(Zr0.52Ti0.48)O3Ceramics with CuO Content vol.51, pp.7R, 2012, https://doi.org/10.7567/JJAP.51.075802
  4. Electrical properties of lead-free 0.98(Na0.5K0.5Li0.1)NbO3-0.02Ba(Zr0.52Ti0.48)O3 ceramics by sintering temperature vol.8, pp.3, 2012, https://doi.org/10.1007/s13391-012-2002-5
  5. Piezoelectric Properties of ZnO-Doped 0.98(Na0.5K0.5)NbO3-0.02Ba(Zr0.52Ta0.48)O3 Ceramics vol.140, pp.1, 2012, https://doi.org/10.1080/10584587.2012.741865
  6. Effect of sintering temperatures on the piezoelectric and dielectric properties of 0.98(Na0.5K0.5)NbO3-0.02(Ba0.5Ca0.5)TiO3 ceramics vol.9, pp.2, 2013, https://doi.org/10.1007/s13391-012-2160-5
  7. A Review on Key Issues and Challenges in Devices Level MEMS Testing vol.2016, 2016, https://doi.org/10.1155/2016/1639805
  8. Electrical properties of lead-free 0.98(Na0.5K0.5Lix)NbO3-0.02Ba(Zr0.52Ti0.48)O3 ceramics vol.8, pp.1, 2012, https://doi.org/10.1007/s13391-011-1063-1
  9. Piezoelectric and dielectric properties of 0.98(Na0.5K0.5)NbO3–0.02Ba(ZrxTi(1−x))O3 ceramics vol.47, pp.10, 2012, https://doi.org/10.1016/j.materresbull.2012.04.095
  10. Preparation and characteristics of Li4Ti5O12 with various dopants as anode electrode for hybrid supercapacitor vol.13, pp.7, 2013, https://doi.org/10.1016/j.cap.2013.04.002
  11. A spongy graphene based bimorph actuator with ultra-large displacement towards biomimetic application vol.6, pp.21, 2014, https://doi.org/10.1039/C4NR02768J
  12. Dielectric and piezoelectric properties of 0.95(Na0.5K0.5)NbO3-0.05CaTiO3 ceramics with Ag2O contents vol.8, pp.6, 2012, https://doi.org/10.1007/s13391-012-2072-4
  13. Synthesis of high-performance Li4Ti5O12 and its application to the asymmetric hybrid capacitor vol.9, pp.6, 2013, https://doi.org/10.1007/s13391-013-6032-4
  14. Ferroelectric and piezoelectric properties of lead-free 0.98(Na0.5K0.5)NbO3-0.02Ba(Zr0.52Ti0.48)O3 ceramics with various sintering temperatures vol.8, pp.2, 2012, https://doi.org/10.1007/s13391-012-1068-4