Surface Treatment and Functional Materials for Nanoimprint Lithography

나노임프린트를 위한 표면처리공정 및 기능성 재료

  • Choi Dae-Geun (Nano-Mechanical Systems Research Center, Korea Institute of Machinery & Materials) ;
  • Lee Eung-Sug (Nano-Mechanical Systems Research Center, Korea Institute of Machinery & Materials)
  • 최대근 (한국기계연구원 나노공정장비연구센터) ;
  • 이응숙 (한국기계연구원 나노공정장비연구센터)
  • Published : 2006.04.01