한국고분자학회지:고분자과학과기술 (Polymer Science and Technology)
- 제17권2호
- /
- Pages.182-190
- /
- 2006
- /
- 1225-0260(pISSN)
- /
- 2586-1476(eISSN)
반도체용 고분자 소재의 표면 및 계면 특성
Surface and Interface Properties of Polymers in Semiconductor Application
- 최남욱 (삼성전자 반도체총괄 생산기술1팀) ;
- 박석봉 (삼성전자 반도체총괄 생산기술1팀) ;
- 문상식 (삼성전자 반도체총괄 생산기술1팀) ;
- 김재현 (삼성전자 반도체총괄 생산기술1팀)
- Choi, Nam-Uk (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics) ;
- Park, Seok-Bong (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics) ;
- Moon, Sang-Sik (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics) ;
- Kim, Jae-Hyun (Functional Material Part, Manufacturing Technology 1 Team, Memory Division, Samsung Electronics)
- 발행 : 2006.04.01