Macromolecular Research

The Polymer Society of Korea (한국고분자학회)
권호 표지

Direct Laser Patterning on Opaque Substrate in Two-Photon Polymerization

  • Park Sang-Hu (Department of Mechanical Engineering, Korea Advanced Institute of Science & Technology, Science Town) ;
  • Lim Tae-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science & Technology, Science Town) ;
  • Yang Dong-Yol (Department of Mechanical Engineering, Korea Advanced Institute of Science & Technology, Science Town) ;
  • Kong Hong-Jin (Department of Physics, Korea Advanced Institute of Science & Technology, Science Town) ;
  • Kim Joo-Yeon (Department of Polymer Science and Engineering, Hannam University) ;
  • Lee Kwang-Sup (Department of Polymer Science and Engineering, Hannam University)
  • Published : 2006.04.01
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References

  1. R. F. Pease, Jpn. J. Appl. Phys., 31, 4103 (1992) https://doi.org/10.1143/JJAP.31.4103
  2. M. D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S. A. Lyon, and S. Y. Chou, Appl. Phys. Lett., 84, 5299 (2004) https://doi.org/10.1063/1.1766071
  3. B. K. Yoon, W. Hwang, Y. J. Park, J. Hwang, C. Park, and J. Chang, Macromol. Res., 13, 435 (2005) https://doi.org/10.1007/BF03218477
  4. J. E. Bjorkholm, Intel Techn. J. Q3, 1988, 1
  5. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, J. Vac. Sci. Techn. B, 14, 4129 (1996) https://doi.org/10.1116/1.588605
  6. A. Kumar and G. M. Whitesides, Appl. Phys. Lett., 63, 2002 (1993) https://doi.org/10.1063/1.110628
  7. Y. Xia, E. Kim, X. M. Zhao, J .A. Rogers, M. Prentiss, and G. M. Whitesides, Science, 273, 347 (1996) https://doi.org/10.1126/science.273.5273.347
  8. X. M. Zhao, Y. Xia, and G. M. Whitesides, Adv. Mater., 8, 837 (1996) https://doi.org/10.1002/adma.19960081016
  9. E. Kim, Y. Xia, and G. M. Whitesides, Nature, 376, 581 (1995) https://doi.org/10.1038/376581a0
  10. S. Kawata, H. B. Sun, T. Tanaka, and K. Takadam, Nature, 412, 697 (2001) https://doi.org/10.1038/35089130
  11. J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Frohlich, and M. Popall, Opt. Lett., 28, 301 (2003) https://doi.org/10.1364/OL.28.000301
  12. S. H. Park, T. W. Lim, D.-Y. Yang, H. J. Kong, and K.-S. Lee, Polymer(Korea), 28, 305 (2004)
  13. S. H. Park, T. W. Lim, S. H. Lee, D.-Y. Yang, S. W. Yi, H. J. Kong, and K.-S. Lee, Polymer(Korea), 29, 146 (2005)
  14. K. Takada, H. B. Sun, and S. Kawata, Appl. Phys. Lett., 86, 071122 (2005) https://doi.org/10.1063/1.1864249
  15. A. S. Dvornikov and P. M. Rentzepis, Opt. Commun., 119, 341 (1995) https://doi.org/10.1016/0030-4018(95)00338-9
  16. H. B. Sun, S. Matsuo, and H. Misawa, Appl. Phys. Lett., 74, 786 (1999) https://doi.org/10.1063/1.123367
  17. P. Galajda and P. Ormos, Appl. Phys. Lett., 78, 249 (2001) https://doi.org/10.1063/1.1339258
  18. H. B. Sun, K. Takada, and S. Kawata, Appl. Phys. Lett., 79, 3173 (2001) https://doi.org/10.1063/1.1418024
  19. T. W. Lim, S. H. Park, and D.-Y. Yang, Microelectron. Eng., 77, 382 (2005) https://doi.org/10.1016/j.mee.2005.01.022
  20. H. A. Dieck and R. F. Heck, J. Am. Chem. Soc., 96, 1133 (1974) https://doi.org/10.1021/ja00811a029
  21. V. K. Varadan, X. Jiang, and V. V. Varadan, Microstreolithography and Other Fabrication Techniques for 3D MEMS, John Wiley & Sons, Chichester, 2001
  22. S. H. Park, S. H. Lee, D.-Y. Yang, H. J. Kong, and K.-S. Lee, Appl. Phys. Lett., 87, 154108 (2005) https://doi.org/10.1063/1.2103393
  23. K.-S. Lee, R. H. Kim, D.-Y. Yang, and S. H. Park, Polym. Adv. Technol., 2005, in press
  24. H. B. Sun, K. Takada, M. S. Kim, K.-S. Lee, and S. Kawata, Appl. Phys. Lett., 83, 1104 (2003) https://doi.org/10.1063/1.1599968